Raith GmbH is buying Vistec Lithography from private equity firm Golden Gate Capital.

Raith, headquartered in Dortmund, Germany, manufactures electron and ion beam lithography systems for nanofabrication.

Watervliet, N.Y.-based Vistec also develops and manufactures electron-beam lithography tools.

“Raith´s and Vistec Lithography´s product lines complement each other perfectly and build a most complete range of nanofabrication instruments,” says Ralf Jede, Raith’s chief executive.

Golden Gate, headquartered in San Francisco, has $12 billion in capital under management. The firm has invested in Sierra Systems, the Attachmate Group Inc. and Itronix. Terms of the deal were not disclosed.

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