Lam Research Corp. (NASDAQ: LRCX) agreed to acquire KLA- Tencor Corp. (NASDAQ: KLAC) in a $10.6 billion cash-and-stock deal, testing regulators six months after a smaller merger between chip- equipment suppliers was halted over antitrust concerns.

KLA-Tencor shareholders can elect to receive $32 in cash and 0.5 of a Lam Research common stock, in all-cash, all-stock, or mixed consideration, according to a statement Wednesday. The offer values KLA-Tencor at about $67.02 a share, or 24 percent more than the stock’s last closing price in New York.

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